Acronyms, Abbreviations, and Initialisms.
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The meaning of the Acronym LPSM is...

LPSM is

  • Levenson Phase Shift Mask

LPSM is also in:

Acronym Definition Searched: PIFOV DIH PJHS AZN CFM WSIG 15442 SAFE 08989 NHLI HOTS OTI EVO XNS PTR